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Equipment

Optical 3D profilometer Rtec UP-2000

The device is essential for visualization and height measurement of structures produced during lithography, enabling the selection of appropriate microfabrication protocols for molds/stamps and prototype microfluidic devices.

Figure 1: Optical 3D profilometer Rtec UP-2000

 

Maskless lithography system KLOE Dilase 650

The installation scheduled for the end of February 2026.
The device enables efficient microfabrication prototyping, in particular the fabrication of molds/stamps and prototype microfluidic devices using photolithography.

 

Inverted microscope Nikon Eclipse Ti2-U equipped with a laser set, data acquisition card, and optical table

The installation scheduled for March 2026.
The system includes an inverted microscope featuring a detector connection port, objectives with magnifications of 4×, 10×, 20×, 40×, and 60×, a high-speed camera, and a fluorescence detection module. The laser set generates a coherent, multi-color light beam with stable power, used for multiplex fluorescence measurements and light-scattering detection in droplets The data acquisition card is essential for high-throughput analysis and processing of optical signals recorded by the detectors. The optical table provides vibration isolation and forms part of a dedicated setup for conducting microfluidic experiments within the project.